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CAS Number: 352535-01-4
Product Catalog

98-4048
Hafnium › Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) PURATREM, 72-7720, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD
CAS Number: 352535-01-4
MDL Number: MFCD03427130
Molecular Formula:  
Molecular Weight: 410.90
Chemical Formula: Hf[N(CH3)(CH2CH3)]4
Color and Form:  
Note: High temperature Swagelok® cylinder assembly 96-1071 available at extra cost.

Stability: moisture sensitive

Safety: Hazardous

98-4048

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Download This MSDS
SECTION 1: Product Identification
Chemical Name: Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) PURATREM, 72-7720, contained in 50 ml Swagelok® cylinder for CVD/ALD
Product Number: 98-4048
CAS Registry Number: 352535-01-4
Formula: Hf[N(CH3)(CH2CH3)]4
EINECS Number: none
Chemical Family: metal amide complex
Synonym: none
SECTION 2: Composition and Information on Ingredients
Ingredient CAS Number Percent ACGIH (TWA) OSHA (PEL)
Title Compound 352535-01-4 100 no data no data
SECTION 3: Hazards Identification
Emergency Overview: Corrosive to eyes, skin and respiratory tract.
Primary Routes of Exposure: Ingestion, inhalation, skin, eyes
Eye Contact: Causes burns to the eyes
Skin Contact: Causes burns to the skin.
Inhalation: Causes burns to the nose, mucous membranes and respiratory tract.
Ingestion: No information on the physiological effects of ingestion.
Acute Health Effects: Corrosive to skin, eyes and respiratory tract.
Chronic Health Effects: No information available on long-term chronic effects.
NTP: No
IARC: No
OSHA: No
SECTION 4: First Aid Measures
Eye Exposure: Immediately flush the eyes with copious amounts of water for at least 10-15 minutes. A victim may need assistance in keeping their eye lids open. Get immediate medical attention.
Skin Exposure: Wash the affected area with water. Remove contaminated clothes if necessary. Seek medical assistance if irritation persists.
Inhalation: Remove the victim to fresh air. Closely monitor the victim for signs of respiratory problems, such as difficulty in breathing, coughing, wheezing, or pain. In such cases seek immediate medical assistance.
Ingestion: Seek medical attention immediately. Keep the victim calm. Give the victim water (only if conscious). Induce vomiting only if directed by medical personnel.
SECTION 5: Fire Fighting Measures
Flash Point: 52?F (11?C)
Autoignition Temperature: no data
Explosion Limits: no data
Extinguishing Medium: carbon dioxide, foam or dry powder
Special Fire Fighting Procedures: If this product is involved in a fire, fire fighters should be equipped with a NIOSH approved positive pressure self-contained breathing apparatus and full protective clothing.
Hazardous Combustion and Decomposion Products: If involved in a fire, this material may emit irritating organic fumes.
Unusual Fire or Explosion Hazards: No unusual fire or explosion hazards.
SECTION 6: Accidental Release Measures
Spill and Leak Procedures: Small spills can be absorbed into vermiculite or other suitable adsorbent. Sweep up the solid and dispose of.
SECTION 7: Handling and Storage
Handling and Storage: Store cold, in freezer, in a tightly sealed container. Keep away from heat and direct sunlight. Handle and store under an inert atmosphere of nitrogen or argon.
SECTION 8: Exposure Controls and Personal Protection
Eye Protection: Always wear approved safety glasses when handling a chemical substance in the laboratory.
Skin Protection: Wear protective clothing and gloves.
Ventilation: Handle the material in an efficient fume hood.
Respirator: If ventilation is not available a respirator should be worn. The use of respirators requires a Respirator Protection Program to be in compliance with 29 CFR 1910.134.
Additional Protection: No additional protection required.
SECTION 9: Physical and Chemical Properties
Color and Form: colorless to pale yellow liq.
Molecular Weight: 410.9
Melting Point: no data
Boiling Point: no data
Vapor Pressure: no data
Specific Gravity: 1.324
Odor: slight amine odor
Solubility in Water: reacts violently with water
SECTION 10: Stability and Reactivity
Stability: moisture-sensitive liquid
Hazardous Polymerization: no hazardous polymerization
Conditions to Avoid: contact with water
Incompatibility: strong oxidizing agents, water, halogens
Decomposition Products: Carbon dioxide, carbon monoxide, organic fumes and hafnium oxide.
SECTION 11: Toxicological Information
RTECS Data: No information available from the RTECS files.
Carcinogenic Effects: no data
Mutagenic Effects: no data
Tetratogenic Effects: no data
SECTION 12: Ecological Information
Ecological Information: No information available.
SECTION 13: Disposal Considerations
Disposal: Dispose of this material according to local, state and federal regulations.
SECTION 14: Transportation
Shipping Name (CFR): Water-reactive liquid, Corrosive, N.O.S.
Hazard Class (CFR): 4.3
Additional Hazard Class (CFR): 8
Packaging Group (CFR): II
UN ID Number (CFR): UN# 3129
Shipping Name (IATA): Water-reactive liquid, Corrosive, N.O.S.
Hazard Class (IATA): 4.3
Additional Hazard Class (IATA): 8
Packaging Group (IATA): II
UN ID Number (IATA): UN# 3129
SECTION 15: Regulatory Information
TSCA: Listed in the TSCA inventory
SARA (Title 313): Not reportable under SARA Title 313.
Second Ingredient: none
Third Ingredient: none
SECTION 16: Other Information
Disclaimer: The information herein is believed to be accurate and reliable as of the date compiled. However, Strem Chemicals, Inc. makes no representation, warranty, or guarantee of any kind with respect to the information contained in this document or any use of the product based on this information.
Preparation Date: 4/21/2011
Revision Date: 4/21/2011

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