CAS Number: | 352535-01-4 |
MDL Number: | MFCD03427130 |
Molecular Formula: | C12H32HfN4 |
Formula Weight: | 410.90 |
Chemical Formula: | Hf[N(CH3)(CH2CH3)]4 |
Color and Form: | colorless to yellow liq. |
Note: | Available prepacked in ALD cylinder- see 98-4048. Volatile precursor for the ALD, CVD and MOCVD deposition of hafnium oxide. |
Stability: moisture sensitive
Safety: Hazardous - an additional Dangerous Goods freight charge may apply
Physical Characteristics: boiling point 79°/0.1mm, density 1.324
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