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CAS Number: 352535-01-4 Product Catalog
72-7720
Hafnium › Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH PURATREM| CAS Number: | 352535-01-4 |
| MDL Number: | MFCD03427130 |
| Molecular Formula: | CHHfN |
| Formula Weight: | 410.90 |
| Chemical Formula: | Hf[N(CH)(CHCH)] |
| Color and Form: | colorless to yellow liq. |
| Note: | Available prepacked in ALD cylinder- see 98-4048. Volatile precursor for the ALD, CVD and MOCVD deposition of hafnium oxide. |
Stability: moisture sensitive
Safety: Hazardous - an additional Dangerous Goods freight charge may apply
Physical Characteristics: boiling point 79/0.1mm, density 1.324
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