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CAS Number: 352535-01-4 Product Catalog

Silicon Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH PURATREM
CAS Number: 352535-01-4
MDL Number: MFCD03427130
Molecular Formula: C12H32HfN4
Formula Weight: 410.90
Chemical Formula: Hf[N(CH3)(CH2CH3)]4
Color and Form: colorless to yellow liq.
Note: Available prepacked in ALD cylinder- see 98-4048. Volatile precursor for the ALD, CVD and MOCVD deposition of hafnium oxide.

Stability: moisture sensitive

Safety: Hazardous - an additional Dangerous Goods freight charge may apply

Physical Characteristics: boiling point 79°/0.1mm, density 1.324


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