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'Product Blog'

95-3000: New Bubbler for CVD/ALD

Electropolished Stainless Steel Bubbler with Replaceable Seat Springless Diaphragm Valves

We continue to expand our selection of electropolished stainless steel bubblers to meet your metal organic chemical vapor deposition (MOCVD) and chemical vapor deposition (CVD) needs.  We have now introduced a 150mL bubbler equipped with replaceable seat springless diaphragm valves.  These valves, manufactured by Swagelok®, were specifically designed due to the increasingly demanding purity needs of the semiconductor chemical canister market.  The design offers enhanced cleanliness and purge-ability often required to process advanced chemistries in thin film deposition applications.  Whereas typical replaceable seat valves require a long contact area between the seat and the body which can result in reduced or restricted flow and inefficient purging, this design features a tight fitting seat with minimal entrapment areas along with a short height to limit chemical and thermal expansion.These valves are designed with a special detent handle that prevents inadvertent handle rotation when fully open or closed along with a visual window to confirm the open and closed positions. In addition, the handles can also be locked in the closed position for safety purposes.         

For customers choosing to purchase this bubbler, in addition to our standard filling, refilling and cleaning services, we will also replace the seats on these valves as each bubbler is returned with a special installation tool to ensure that the valve seats are installed properly.  

For more information, contact our friendly Customer Service team at or visit


Product mentioned in this blog:

95-3000: Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, replaceable-seat valves with rotated handles, DOT 4B, UN stamped 


Please visit the below link for related products:

Bubblers, Cylinders & Other Equipment


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