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'Product Blog'

CVD/ALD Bubblers & Ampoules for R&D and High-Volume Manufacturing

Our company has more than fifty years of experience in manufacturing inorganic and organometallic chemicals and probably the world´s most extensive product offering of MOCVD, CVD, and ALD precursors.  Continually adding new products for this dynamic and exciting field, our range of products is presented in the online catalog and include:

     *  Metal alkyls

     *  Metal alkylamides

     *  Metal amidinates

     *  Metal alkoxides

     *  Metal β-diketonates

     *  Metal cyclopentadienyls

     *  Metal halides

     *  Volatile organometallics

     *  Volatile metal carbonyls

     *  Fluorinated derivatives

     *  Electronic grade chemicals

     *  Single source precursors for mixed metal oxides


The standard and absolutely safest way to transport and deliver highly reactive ALD & CVD precursors is in stainless steel ampoules. These are often referred to as bubblers since in many cases they are fitted with a dip tube on the inlet allowing efficient vapor delivery by an inert carrier gas like N2, He or Ar. These bubblers are readily fitted with seal tight valves and VCR vacuum fittings for easy and safe installation directly on the ALD/CVD tool gas box by a qualified person.

In addition to our 450+ precursors, we offer a variety of electropolished stainless steel bubblers at capacities ranging from 150ml to 3000ml. These bubblers are available in horizontal-in-line and vertical configurations. While standard bubblers are equipped with diaphragm valves rated to 121°C (PCTFE stem tips), Strem also supplies bubblers with high-temperature bellows valves rated to 315°C. DOT and UN approved configurations are available.


An assortment of cylinders for ALD can be found in the online catalog with standard, high-temperature and high-purity options. In addition, Strem provides additional services to our customers for their MOCVD, CVD & ALD needs such as:

     *  Cylinder/Bubbler Cleaning

     *  Precursor Filling & Refilling

     *  Prepackaged Precursors in ALD Cylinders


Above, are small sized vapor draw ampoules for research amounts of precursors. The sleek design affords a very compact precursor delivery system.


Bubbler specifications

Our equipment offerings allow you to match a bubbler to your current ALD or CVD tool gas box. The bubbler can be specified using a vast range of types, dimensions, and valve configurations. Depending on the precursor to be supplied the valves, materials and dip tube configuration can be optimized for the most efficient precursor delivery even at elevated temperatures (up to 315 °C).

Strem offers four of the most popular bubbler designs, which can be made to fit inside most of the ALD/CVD tools on the market today as well many custom built systems.


Once you decide your preference of bubbler, you will need to measure the critical dimensions (A to E), such as volume, temperature operation, and dip tube configuration. Then you´re ready to order the ideal bubbler filled with your desired precursor. By following the guide you can be sure that the bubbler will fit like a glove into your precursor cabinet!


**This blog had been researched, produced and written by Jonas Sunquist.  It is reposted from BALD Engineering's blog on January 23, 2019.  Original blog:  **


For more information about our CVD/ALD Precursors and Equipment please visit the links below:

MOCVD, CVD & ALD Precursors Booklet




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