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Metal Alkylamides

Aluminum › Compounds

Catalog Number		Description	CAS Number
View Structures
13-4500		Hexakis(dimethylamino)dialuminum 98% (99.9%-Al) TDMAA	32093-39-3

Antimony › Compounds

Catalog Number		Description	CAS Number
View Structures
51-5000		Tris(dimethylamino)antimony (99.99%-Sb) PURATREM	7289-92-1

Arsenic › Compounds

Catalog Number		Description	CAS Number
View Structures
33-5000		Tris(dimethylamino)arsine, 99%	6596-96-9

Cobalt › Compounds

Catalog Number		Description	CAS Number
View Structures
27-0469		Bis(N-t-butyl-N'-ethylpropanimidamidato)cobalt(II), min. 98% (99.99%-Co) PURATREM	1011477-51-2

Gallium › Compounds

Catalog Number		Description	CAS Number
View Structures
31-2030		Bis(µ-dimethylamino)tetrakis(dimethylamino)digallium, 98%	57731-40-5

Hafnium › Compounds

Catalog Number	Description	CAS Number
View Structures
72-7750	Tetrakis(diethylamino)hafnium, 99% (99.99+%-Hf, <0.2% Zr) PURATREM	19824-55-6
72-8000	Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2% Zr) TDMAH, PURATREM	19782-68-4
98-4021	Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2%-Zr) TDMAH, PURATREM, 72-8000, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD	19782-68-4
98-4022	Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2%-Zr) TDMAH, PURATREM, 72-8000, contained in 50ml Swagelok® cylinder (96-1071) for CVD/ALD	19782-68-4
72-7720	Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH PURATREM	352535-01-4
98-4048	Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH, PURATREM, 72-7720, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD	352535-01-4

Niobium › Compounds

Catalog Number		Description	CAS Number
View Structures
41-5300		Pentakis(dimethylamino)niobium(V), 99%	19824-58-9

Nitrogen › Compounds

Catalog Number		Description	CAS Number
View Structures
07-0385		N,N'-Di-t-butyl-2,3-diaminobutane, 98%	1167987-07-6

Silicon › Compounds

Catalog Number		Description	CAS Number
View Structures
14-1550		Bis(ethylmethylamino)silane, 99%, BEMAS (99.999%-Si) PURATREM	1011514-41-2

Tantalum › Compounds

Catalog Number	Description	CAS Number
View Structures
73-0490	t-Amylimidotris(dimethylamino)tantalum(V) TAIMATA	629654-53-1
73-0700	t-Butylimidotris(dimethylamino)tantalum(V), min. 98%	69039-11-8
98-4045	t-Butylimidotris(dimethylamino)tantalum(V), min. 98%, 73-0700, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD	69039-11-8
73-0800	Pentakis(dimethylamino)tantalum(V), min 98% PDMAT	19824-59-0

Tin › Compounds

Catalog Number	Description	CAS Number
View Structures
50-1150	N,N'-Di-t-butyl-2,3-diamidobutanetin(II), 98%	1268357-44-3
98-4052	N,N'-Di-t-butyl-2,3-diamidobutanetin(II), 98%, 50-1150, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD	1268357-44-3
50-1815	Tetrakis(dimethylamino)tin(IV), 99% (99.99%-Sn) TDMASn PURATREM	1066-77-9
98-4050	Tetrakis(dimethylamino)tin(IV), 99% (99.99%-Sn) TDMASn PURATREM, 50-1815, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD	1066-77-9

Titanium › Compounds

Catalog Number	Description	CAS Number
View Structures
22-2240	Tetrakis(dimethylamino)titanium(IV), 99% TDMAT (99.99%-Ti) PURATREM	3275-24-9
22-1050	Tetrakis(diethylamino)titanium(IV), 99%	4419-47-0
98-4043	Tetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD	4419-47-0
93-2240	Tetrakis(dimethylamino)titanium(IV), 99% TDMAT	3275-24-9
98-4015	Tetrakis(dimethylamino)titanium(IV), 99% TDMAT, 93-2240, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD	3275-24-9
98-4016	Tetrakis(dimethylamino)titanium(IV), 99% TDMAT, 93-2240, contained in high-temp 50 ml Swagelok® cylinder (96-1071) for CVD/ALD	3275-24-9

Vanadium › Compounds

Catalog Number		Description	CAS Number
View Structures
23-0365		Tetrakis(ethylmethylamino)vanadium(IV), 98% TEMAV	791114-66-4

Yttrium › Compounds

Catalog Number	Description	CAS Number
View Structures
39-1500	Tris[N,N-bis(trimethylsilyl)amide]yttrium(III), min. 98% (99.9%-Y) (REO)	41836-28-6
98-4018	Tris[N,N-bis(trimethylsilyl)amide]yttrium(III), min. 98% (99.9%-Y) (REO), 39-1500, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD	41836-28-6

Zirconium › Compounds

Catalog Number	Description	CAS Number
View Structures
93-4040	Tetrakis(diethylamino)zirconium, 99%	13801-49-5
40-4100	Tetrakis(dimethylamino)zirconium(IV), 99% TDMAZ	19756-04-8
98-4012	Tetrakis(dimethylamino)zirconium(IV), 99% TDMAZ, 40-4100, contained in 50 ml Swagelok® cylinder for (96-1070) CVD/ALD	19756-04-8
40-1710	Tetrakis(ethylmethylamino)zirconium(IV), 99% TEMAZ	175923-04-3
98-4039	Tetrakis(ethylmethylamino)zirconium(IV) 99% TEMAZ, 40-1710, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD	175923-04-3