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Metal Alkoxides for CVD & ALD

Aluminum › Compounds

Catalog Number	Description	CAS Number
View Structures
93-1308	Aluminum s-butoxide, 98%	2269-22-9
93-1370	Aluminum ethoxide, 99%	555-75-9
93-1345	Aluminum i-propoxide, 98+%	555-31-7
13-1600	Dimethylaluminum i-propoxide, 98% (99.99+%-Al) PURATREM	6063-89-4

Antimony › Compounds

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93-5113 2155-74-0	93-5115 10433-06-4

Copper › Compounds

Catalog Number		Description	CAS Number
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29-7120		Bis(dimethylamino-2-propoxy)copper(II), min. 97% Cu(dmap)2	185827-91-2

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29-7120 185827-91-2

Germanium › Compounds

Catalog Number		Description	CAS Number
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93-3206		Germanium(IV) ethoxide (99.99+%-Ge) PURATREM	14165-55-0

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93-3206 14165-55-0

Hafnium › Compounds

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72-5800 2172-02-3	72-5900 13428-80-3

Lead › Compounds

Catalog Number		Description	CAS Number
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82-2155		Bis(1-dimethylamino-2-methyl-2-propanolate)lead(II), 98% Pb(DMAMP)2	934302-16-6

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82-2155 934302-16-6

Nickel › Compounds

Catalog Number		Description	CAS Number
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28-1301		Bis(cyclopentadienyl)nickel, 99% (Nickelocene)	1271-28-9

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28-1301 1271-28-9

Niobium › Compounds

Catalog Number		Description	CAS Number
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93-4104		Niobium(V) ethoxide (99.9+%-Nb)	3236-82-6

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93-4104 3236-82-6

Silicon › Compounds

Catalog Number	Description	CAS Number
View Structures
93-1451	Tetrabutoxysilane, min. 97%	4766-57-8
93-1454	Tetraethoxysilane, min. 98% TEOS	78-10-4
93-1459	Tetramethoxysilane, 98%	681-84-5
14-7015	Tri-t-butoxysilanol (99.999%-Si) PURATREM	18166-43-3
14-7020	Tri-t-pentoxysilanol (99.999%-Si) PURATREM	17906-35-3

Tantalum › Compounds

Catalog Number	Description	CAS Number
View Structures
93-7303	Tantalum(V) ethoxide (99.99+%-Ta) PURATREM	6074-84-6
73-1080	Tantalum(V) ethoxide (99.9999%-Ta) PURATREM	6074-84-6
93-7329	Tantalum(V) methoxide (99.99+%-Ta) PURATREM	865-35-0

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93-7303 6074-84-6	73-1080 6074-84-6	93-7329 865-35-0

Tin › Compounds

Catalog Number		Description	CAS Number
View Structures
50-2100		Tin(IV) t-butoxide (99.99%-Sn) PURATREM	36809-75-3

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50-2100 36809-75-3

Titanium › Compounds

Catalog Number	Description	CAS Number
View Structures
93-2204	Titanium(IV) n-butoxide, 98+%	5593-70-4
22-1170	Titanium(IV) t-butoxide (99.95%-Ti)	3087-39-6
22-2209	Titanium(IV) ethoxide (99.99%-Ti) PURATREM	3087-36-3
93-2216	Titanium(IV) i-propoxide, min. 98%	546-68-9
98-4030	Titanium(IV) i-propoxide, min. 98%, 93-2216, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD	546-68-9

Vanadium › Compounds

Catalog Number		Description	CAS Number
View Structures
23-5000		Vanadium (V) tri-i-propoxy oxide, 98+% VTIP	5588-84-1

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23-5000 5588-84-1

Zirconium › Compounds

Catalog Number	Description	CAS Number
View Structures
40-1749	Zirconium(IV) t-butoxide, 99%	2081-12-1
40-1750	Zirconium(IV) t-butoxide (99.99%-Zr) PURATREM	2081-12-1
93-4043	Zirconium(IV) ethoxide, 99+%	18267-08-8

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40-1749 2081-12-1	40-1750 2081-12-1	93-4043 18267-08-8