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CVD & ALD Precursors

Close Section Aluminum › Compounds
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Catalog Number   Description CAS Number
13-4500 13-4500
Hexakis(dimethylamino)dialuminum 98% (99.9%-Al) TDMAA 32093-39-3
93-1302 93-1302
Aluminum acetylacetonate, 98% 13963-57-0
93-1385 93-1385
Aluminum bromide, 99% 7727-15-3
93-1308 93-1308
Aluminum s-butoxide, 98% 2269-22-9
93-1387 93-1387
Aluminum chloride, anhydrous, reagent, 99% 7446-70-0
13-0050 13-0050
Aluminum chloride, anhydrous (99.99+%-Al) PURATREM 7446-70-0
93-1370 93-1370
Aluminum ethoxide, 99% 555-75-9
13-0200 13-0200
Aluminum hexafluoroacetylacetonate, min. 98% 15306-18-0
93-1389 93-1389
Aluminum iodide, 95% 7784-23-8
93-1345 93-1345
Aluminum i-propoxide, 98+% 555-31-7
97-0139 97-0139
Aluminum i-propoxide (99.99+%-Al) PURATREM 555-31-7
13-1600 13-1600
Dimethylaluminum i-propoxide, 98% (99.99+%-Al) PURATREM 6063-89-4
93-1358 93-1358
Tri-i-butylaluminum, min. 95% 100-99-2
13-1850 13-1850
Triethylaluminum, min. 93% 97-93-8
98-1855 98-1855
Triethylaluminum, elec. gr. (99.999+%-Al) PURATREM 97-93-8
13-1900  
Triethyl(tri-sec-butoxy)dialuminum (contains diethyl(tetra-sec-butoxy)dialuminum and tetraethyl(di-sec-butoxy)dialuminum)
93-1360 93-1360
Trimethylaluminum, min. 98% 75-24-1
98-4003 98-4003
Trimethylaluminum, min. 98%, 93-1360, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 75-24-1
98-4004 98-4004
Trimethylaluminum, min. 98%, 93-1360, contained in high-temp 50 ml Swagelok® cylinder (96-1071) for CVD/ALD 75-24-1
98-1955 98-1955
Trimethylaluminum, elec. gr. (99.999+%-Al) PURATREM 75-24-1
98-4008 98-4008
Trimethylaluminum, elec. gr. (99.999+%-Al) PURATREM, 98-1955, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 75-24-1
98-4007 98-4007
Trimethylaluminum, elec. gr. (99.999+%-Al) PURATREM, 98-1955, contained in 50 ml electropolished Swagelok® cylinder (96-1077) for CVD/ALD 75-24-1
13-5000 13-5000
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)aluminum, 99% (99.9%-Al) [Al(TMHD)3] 14319-08-5
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Catalog Number   Description CAS Number
98-0272 98-0272
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, high temp valves (315°C)
95-0272  
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, high temp valves (315°C), DOT 4B, UN stamped
96-5151 96-5151
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip
95-5151  
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
98-0273 98-0273
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip with reversed handles
95-0273  
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip with reversed handles, DOT 4B, UN stamped
98-0275 98-0275
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip with rotated handles
96-5006 96-5006
Stainless steel bubbler, 300ml, horizontal in line, electropolished with fill-port, high temp valves (315°C)
95-5006  
Stainless steel bubbler, 300ml, horizontal in line, electropolished with fill-port, high temp valves (315°C), DOT 4B, UN stamped
96-5298 96-5298
Stainless steel bubbler, 300ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip
95-5298  
Stainless steel bubbler, 300ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-5007 96-5007
Stainless steel bubbler, 600ml, horizontal in line, electropolished with fill-port, high temp valves (315°C)
95-5007  
Stainless steel bubbler, 600ml, horizontal in line, electropolished with fill-port, high temp valves (315°C), DOT 4B, UN stamped
96-5599 96-5599
Stainless steel bubbler, 600ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip
95-5599 95-5599
Stainless steel bubbler, 600ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-5008 96-5008
Stainless steel bubbler, 1000ml, horizontal in line, electropolished with fill-port, high temp valves (315°C)
95-5008  
Stainless steel bubbler, 1000ml, horizontal in line, electropolished with fill-port, high temp valves (315°C), DOT 4B, UN stamped
96-5998 96-5998
Stainless steel bubbler, 1000ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip
95-5998  
Stainless steel bubbler, 1000ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-5004 96-5004
Stainless steel bubbler, 1800ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip
95-5004  
Stainless steel bubbler, 2000ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
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Catalog Number   Description CAS Number
98-0271 98-0271
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, high temp valves (315°C)
97-7000 97-7000
All New
Stainless steel low volume bubbler, 7ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-4158  
All New
Stainless steel bubbler, 200ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, no dip tube, DOT 4B, UN stamped
95-0271 95-0271
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, high temp valves (315°C), DOT 4B, UN stamped
95-4155 95-4155
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, DOT 4B, UN stamped
98-0276 98-0276
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, high temp valves (315°C), with short dip tube, cut to 1 inch from top of bubbler
95-0276 95-0276
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, high temp valves (315°C), with short dip tube, cut to 1 inch from top of bubbler, DOT 4B, UN stamped
96-4151 96-4151
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-4151 95-4151
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-4153  
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, PCTFE valve stem tip with rotated handles
95-4153  
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, PCTFE valve stem tip with rotated handles, DOT 4B, UN stamped
96-4149 96-4149
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, PCTFE valve stem tip, with short dip tube, cut to 5cm from top of bubbler
95-4157 95-4157
Stainless steel bubbler, 200ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, DOT 4B, UN stamped
98-0270 98-0270
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C)
95-0270 95-0270
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C), DOT 4B, UN stamped
98-0280 98-0280
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles
95-0280  
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, DOT 4B, UN stamped
96-4295 96-4295
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, no dip tube
95-4295  
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, no dip tube, DOT 4B, UN stamped
96-4290 96-4290
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-4290  
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-4599 96-4599
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, high temp valves (315°C)
95-4599  
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, high temp valves (315°C), DOT 4B, UN stamped
96-4610 96-4610
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, no dip tube, stems same height
95-4610 95-4610
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, no dip tube, stems same height, DOT 4B, UN stamped
96-4598 96-4598
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-4598 95-4598
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-4996 96-4996
Stainless steel bubbler, 1000ml, vertical, electropolished with fill-port, high temp valves (315°C)
96-4998 96-4998
Stainless steel bubbler, 1000ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-4998  
Stainless steel bubbler, 1000ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-5002 96-5002
Stainless steel bubbler, 1000ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-5002  
Stainless steel bubbler, 1200ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-5003 96-5003
Stainless steel bubbler, 1400ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-5003  
Stainless steel bubbler, 1500ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-5001 96-5001
Stainless steel bubbler, 1800ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-5001 95-5001
Stainless steel bubbler, 2000ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-5011 96-5011
Stainless steel bubbler, 2750ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-5011 95-5011
Stainless steel bubbler, 3000ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
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Close Section Erbium › Compounds
Close Section Europium › Compounds
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Close Section Hafnium › Compounds
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Catalog Number   Description CAS Number
72-0700 72-0700
Bis(cyclopentadienyl)dimethylhafnium, min. 97% 37260-88-1
72-1000 72-1000
Bis(cyclopentadienyl)hafnium dichloride, min. 98% (Hafnocene dichloride) 12116-66-4
72-1250 72-1250
Bis(ethylcyclopentadienyl)hafnium dichloride, min. 98% 78205-93-3
72-1500 72-1500
Bis(pentamethylcyclopentadienyl)hafnium dichloride, min. 98% 85959-83-7
72-2000 72-2000
Bis(i-propylcyclopentadienyl)hafnium dichloride, min. 98% 66349-80-2
72-1900 72-1900
Dimethylbis(t-butylcyclopentadienyl)hafnium(IV), min. 98% 68193-45-3
72-2002 72-2002
Hafnium(IV) acetylacetonate, min. 96% 17475-67-1
72-5800 72-5800
Hafnium(IV) t-butoxide (99.9%-Hf, <1.5%-Zr) 2172-02-3
72-0751 72-0751
Hafnium(IV) chloride, sublimed grade (99.9+%-Hf, <1.0% Zr) 13499-05-3
72-5900 72-5900
Hafnium(IV) ethoxide, 99% 13428-80-3
72-6000 72-6000
Pentamethylcyclopentadienylhafnium trichloride, min. 98% 75181-08-7
72-7000 72-7000
i-Propylcyclopentadienylhafnium trichloride, min. 98% 329736-06-3
72-7750 72-7750
Tetrakis(diethylamino)hafnium, 99% (99.99+%-Hf, <0.2% Zr) PURATREM 19824-55-6
72-8000 72-8000
Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2% Zr) TDMAH, PURATREM 19782-68-4
98-4021 98-4021
Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2%-Zr) TDMAH, PURATREM, 72-8000, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 19782-68-4
98-4022 98-4022
Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2%-Zr) TDMAH, PURATREM, 72-8000, contained in 50ml Swagelok® cylinder (96-1071) for CVD/ALD 19782-68-4
72-7720 72-7720
Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH PURATREM 352535-01-4
98-4048 98-4048
Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH, PURATREM, 72-7720, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 352535-01-4
72-7580 72-7580
Tetrakis(2,2,6,6-tetramethyl-3,5-heptanedionato)hafnium(IV), 99% 63370-90-1
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Catalog Number   Description CAS Number
26-3915 26-3915
Tris(2,6-dimethyl-3,5-heptanedionato)iron(III), 98% Fe(dibm)3 24444-72-2
26-1699 26-1699
Bis(cyclopentadienyl)iron, 98% (Ferrocene) 102-54-5
26-1700 26-1700
Bis(cyclopentadienyl)iron, 99% (Ferrocene) 102-54-5
26-0145 26-0145
Bis(N,N'-di-t-butylacetamidinato)iron (II), min. 98% 635680-56-7
26-0310 26-0310
Bis(ethylcyclopentadienyl)iron, min. 98% 1273-97-8
26-1640 26-1640
Bis(1,​1,​1,​5,​5,​5-
hexafluoroacetylacetonato)(N,N,N',N'-tetramethylethylenediamine)iron(II), min. 98%
73450-43-8
26-0400 26-0400
Bis(pentamethylcyclopentadienyl)iron, 99% 12126-50-0
26-0450 26-0450
Bis(i-propylcyclopentadienyl)iron, min. 98% 12126-34-0
93-2602 93-2602
n-Butylferrocene, 99% 31904-29-7
26-0700 26-0700
t-Butylferrocene, min. 98% 1316-98-9
26-0850  
Cyclohexadiene iron tricarbonyl, 98% 12152-72-6
26-0875 26-0875
Cyclooctatetraene iron tricarbonyl, 98% 12093-05-9
26-0900 26-0900
Cyclopentadienyliron dicarbonyl dimer, 99% 12154-95-9
26-1500 26-1500
1,1'-Dimethylferrocene, min. 98% 1291-47-0
26-1600 26-1600
Ethylferrocene, 98% 1273-89-8
26-2300 26-2300
Iron(III) acetylacetonate, 99% 14024-18-1
26-2640 26-2640
Iron nonacarbonyl, 99% 15321-51-4
26-2800 26-2800
Iron pentacarbonyl, 99.5% (99.9+%-Fe) 13463-40-6
26-2801 26-2801
Iron pentacarbonyl, 99.5% (99.9+%-Fe) (Sure/Seal™ bottle) 13463-40-6
93-2644 93-2644
Iron(III) trifluoroacetylacetonate, 99% (99.9%-Fe) 14526-22-8
26-3910 26-3910
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)iron(III), 99% (99.9%-Fe) [Fe(TMHD)3] 14876-47-2
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Catalog Number   Description CAS Number
12-0845 12-0845
Bis(N,N'-di-sec-butylacetamidinato)magnesium, 99%
12-0865 12-0865
All New
Bis(N-t-butyl-N'-ethylpropanimidamidato)magnesium, min. 98% (99.99+%-Li) PURATREM
12-0500 12-0500
Bis(cyclopentadienyl)magnesium (99.9+%-Mg) 1284-72-6
97-1040 97-1040
Bis(cyclopentadienyl)magnesium (99.99+%-Mg) PURATREM 1284-72-6
12-0510 12-0510
Bis(ethylcyclopentadienyl)magnesium, min. 98% 114460-02-5
98-4006 98-4006
Bis(ethylcyclopentadienyl)magnesium, min. 98%, 12-0510, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 114460-02-5
98-4010 98-4010
Bis(ethylcyclopentadienyl)magnesium, min. 98%, 12-0510, contained in high-temp 50 ml Swagelok® cylinder (96-1071) for CVD/ALD 114460-02-5
97-1045 97-1045
Bis(pentamethylcyclopentadienyl)magnesium, elec. gr. (99.999%-Mg) PURATREM 74507-64-5
12-0550 12-0550
Bis(n-propylcyclopentadienyl)magnesium, min. 98% 114504-74-4
12-0900 12-0900
Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)magnesium, anhydrous, min. 98% [Mg(TMHD)2] 21361-35-3
98-4069 98-4069
Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)magnesium, anhydrous, min. 98% [Mg(TMHD)2] , 12-0900, contained in high-temp 50 ml Swagelok® cylinder (96-1071) for CVD/ALD 21361-35-3
12-1000 12-1000
Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)magnesium dihydrate, min. 98% [Mg(TMHD)2] 625832-70-4
93-1280 93-1280
Magnesium acetylacetonate, anhydrous, 98% 14024-56-7
93-1227 93-1227
Magnesium hexafluoroacetylacetonate dihydrate, min. 97% 120156-45-8
12-1212  
Magnesium (N,N,N',N'-tetramethylethylenediamine)bis[BREW] (99.99+%-Mg) PURATREM
93-1259 93-1259
Magnesium trifluoroacetylacetonate dihydrate, min. 98% 53633-79-7
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Catalog Number   Description CAS Number
28-0025 28-0025
Bis[1-(N,N-dimethylamino)-2-propanolato]nickel(II), 99% NiDMAP 200284-92-0
28-0009 28-0009
All New
Allyl(cyclopentadienyl)nickel(II), min. 97% 12107-46-9
28-1210 28-1210
All New
(Acetonitrile)dichloronickel(II), 99% 18897-44-4
28-0225 28-0225
All New
Bis(1,4-di-t-butyl-1,3-diazabutadienyl)nickel(II) Ni(DAD)2, min. 98% (99.999%-Ni) PURATREM
28-1301 28-1301
Bis(cyclopentadienyl)nickel, 99% (Nickelocene) 1271-28-9
28-0045 28-0045
Bis(N,N'-di-t-butylacetamidinato)nickel(II), (99.999%-Ni) PURATREM 940895-79-4
28-0083 28-0083
Bis(ethylcyclopentadienyl)nickel, min. 98% 31886-51-8
28-0085 28-0085
Bis(pentamethylcyclopentadienyl)nickel, 98% (Decamethylnickelocene) 74507-63-4
28-0086 28-0086
Bis(i-propylcyclopentadienyl)nickel, min. 98% 57197-55-4
28-0087 28-0087
Bis(tetramethylcyclopentadienyl)nickel, min. 98% 79019-60-6
28-0088 28-0088
Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)nickel(II), min. 98% (99.9%-Ni) [Ni(TMHD)2] 14481-08-4
28-1130 28-1130
Nickel(II) acetylacetonate, anhydrous, min. 95% 3264-82-2
28-1110 28-1110
Nickel(II) acetylacetonate hydrate 120156-44-7
28-1150 28-1150
Nickel carbonyl 13463-39-3
93-2821 93-2821
Nickel(II) hexafluoroacetylacetonate hydrate, 98% 14949-69-0
28-1600 28-1600
Nickel(II) phthalocyanine, min. 94% 14055-02-8
93-2843 93-2843
Nickel(II) trifluoroacetylacetonate dihydrate, 98% 14324-83-5
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Catalog Number   Description CAS Number
07-0385 07-0385
N,N'-Di-t-butyl-2,3-diaminobutane, 98% 1167987-07-6
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Close Section Osmium › Compounds
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Catalog Number   Description CAS Number
44-8165 44-8165
Bis(1,1,1-trifluoro-2,4-pentanedionato)(1,5-cyclooctadiene)ruthenium(II), 98% 38704-78-8
44-0056 44-0056
All New
Bis(N,N-di-t-butylacetamidinato)ruthenium(II) dicarbonyl, 98% (99.99%-Ru) PURATREM 949113-49-9
44-5150 44-5150
All New
Allylruthenium(II) tricarbonyl bromide, 98% 31781-74-5
44-6200 44-6200
Bis(cyclopentadienyl)ruthenium, 99% (99.9%-Ru) (Ruthenocene) 1287-13-4
44-0030 44-0030
Bis(2,4-dimethylpentadienyl)ruthenium(II), 99% 85908-78-7
44-0040 44-0040
Bis(ethylcyclopentadienyl)ruthenium(II), 98% (99.9%-Ru) 32992-96-4
98-4009 98-4009
Bis(ethylcyclopentadienyl)ruthenium(II), 98% (99.9%-Ru), 44-0040, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 32992-96-4
98-4067 98-4067
Bis(ethylcyclopentadienyl)ruthenium(II), 98% (99.9%-Ru), 44-0040, contained in high-temp 50 ml Swagelok® cylinder (96-1071) for CVD/ALD 32992-96-4
44-0046 44-0046
Bis(2-methylallyl)(1,5-cyclooctadiene)ruthenium(II), min. 97% 12289-94-0
44-0050 44-0050
Bis(pentamethylcyclopentadienyl)ruthenium, 99% (99.9%-Ru) (Decamethylruthenocene) 84821-53-4
44-0060 44-0060
Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)(1,5-cyclooctadiene)ruthenium(
II), 99% (99.9%-Ru)
329735-79-7
44-0175 44-0175
Dicarbonylcyclopentadienylruthenium dimer, 99% 12132-87-5
44-1800 44-1800
Ruthenium(III) acetylacetonate, 99% 14284-93-6
44-1850 44-1850
Ruthenium carbonyl, 99% 15243-33-1
44-8000 44-8000
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)ruthenium(III), 99% (99.9%-Ru) [Ru(TMHD)3] 38625-54-6
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