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CVD & ALD Precursors

Close Section Aluminum › Compounds
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Catalog Number   Description CAS Number
13-4500 13-4500
Hexakis(dimethylamino)dialuminum 98% (99.9%-Al) TDMAA 32093-39-3
93-1302  
Aluminum acetylacetonate, 98% 13963-57-0
93-1308  
Aluminum s-butoxide, 98% 2269-22-9
13-0050 13-0050
Aluminum chloride, anhydrous (99.99+%-Al) PURATREM 7446-70-0
93-1370  
Aluminum ethoxide, 99% 555-75-9
13-0200 13-0200
Aluminum hexafluoroacetylacetonate, min. 98% 15306-18-0
93-1345  
Aluminum i-propoxide, 98+% 555-31-7
97-0139  
Aluminum i-propoxide (99.99+%-Al) PURATREM 555-31-7
13-1600 13-1600
Dimethylaluminum i-propoxide, 98% (99.99+%-Al) PURATREM 6063-89-4
93-1358  
Tri-i-butylaluminum, min. 95% 100-99-2
13-1850 13-1850
Triethylaluminum, min. 93% 97-93-8
98-1855  
Triethylaluminum, elec. gr. (99.999+%-Al) PURATREM 97-93-8
13-1900  
Triethyl(tri-sec-butoxy)dialuminum (contains diethyl(tetra-sec-butoxy)dialuminum and tetraethyl(di-sec-butoxy)dialuminum)
93-1360 93-1360
Trimethylaluminum, min. 98% 75-24-1
98-4003 98-4003
Trimethylaluminum, min. 98%, 93-1360, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 75-24-1
98-4004 98-4004
Trimethylaluminum, min. 98%, 93-1360, contained in high-temp 50 ml Swagelok® cylinder (96-1071) for CVD/ALD 75-24-1
98-1955 98-1955
Trimethylaluminum, elec. gr. (99.999+%-Al) PURATREM 75-24-1
98-4008 98-4008
Trimethylaluminum, elec. gr. (99.999+%-Al) PURATREM, 98-1955, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 75-24-1
98-4007 98-4007
Trimethylaluminum, elec. gr. (99.999+%-Al) PURATREM, 98-1955, contained in 50 ml electropolished Swagelok® cylinder (96-1077) for CVD/ALD 75-24-1
13-5000 13-5000
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)aluminum, 99% (99.9%-Al) [Al(TMHD)3] 14319-08-5
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Catalog Number   Description CAS Number
98-0272 98-0272
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, high temp valves (315°C)
95-0272  
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, high temp valves (315°C), DOT 4B, UN stamped
96-5151 96-5151
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip
95-5151  
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
98-0273 98-0273
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip with reversed handles
95-0273  
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip with reversed handles, DOT 4B, UN stamped
98-0275 98-0275
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip with rotated handles
96-5006 96-5006
Stainless steel bubbler, 300ml, horizontal in line, electropolished with fill-port, high temp valves (315°C)
95-5006  
Stainless steel bubbler, 300ml, horizontal in line, electropolished with fill-port, high temp valves (315°C), DOT 4B, UN stamped
96-5298 96-5298
Stainless steel bubbler, 300ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip
95-5298  
Stainless steel bubbler, 300ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-5007 96-5007
Stainless steel bubbler, 600ml, horizontal in line, electropolished with fill-port, high temp valves (315°C)
95-5007  
Stainless steel bubbler, 600ml, horizontal in line, electropolished with fill-port, high temp valves (315°C), DOT 4B, UN stamped
96-5599 96-5599
Stainless steel bubbler, 600ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip
95-5599 95-5599
Stainless steel bubbler, 600ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-5008 96-5008
Stainless steel bubbler, 1000ml, horizontal in line, electropolished with fill-port, high temp valves (315°C)
95-5008  
Stainless steel bubbler, 1000ml, horizontal in line, electropolished with fill-port, high temp valves (315°C), DOT 4B, UN stamped
96-5998 96-5998
Stainless steel bubbler, 1000ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip
95-5998  
Stainless steel bubbler, 1000ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-5004 96-5004
Stainless steel bubbler, 1800ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip
95-5004  
Stainless steel bubbler, 2000ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
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Catalog Number   Description CAS Number
98-0271 98-0271
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, high temp valves (315°C)
97-7000 97-7000
New in the Last 3 Months
Stainless steel low volume bubbler, 7ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-0271 95-0271
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, high temp valves (315°C), DOT 4B, UN stamped
95-4155 95-4155
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, DOT 4B, UN stamped
98-0276 98-0276
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, high temp valves (315°C), with short dip tube, cut to 1 inch from top of bubbler
95-0276 95-0276
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, high temp valves (315°C), with short dip tube, cut to 1 inch from top of bubbler, DOT 4B, UN stamped
96-4151 96-4151
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-4151 95-4151
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-4153  
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, PCTFE valve stem tip with rotated handles
95-4153  
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, PCTFE valve stem tip with rotated handles, DOT 4B, UN stamped
96-4149 96-4149
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, PCTFE valve stem tip, with short dip tube, cut to 5cm from top of bubbler
95-4157 95-4157
Stainless steel bubbler, 200ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, DOT 4B, UN stamped
98-0270 98-0270
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C)
95-0270 95-0270
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C), DOT 4B, UN stamped
98-0280 98-0280
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles
95-0280  
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, DOT 4B, UN stamped
96-4295 96-4295
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, no dip tube
95-4295  
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, no dip tube, DOT 4B, UN stamped
96-4290 96-4290
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-4290  
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-4599 96-4599
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, high temp valves (315°C)
95-4599  
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, high temp valves (315°C), DOT 4B, UN stamped
96-4610 96-4610
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, no dip tube, stems same height
95-4610 95-4610
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, no dip tube, stems same height, DOT 4B, UN stamped
96-4598 96-4598
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-4598 95-4598
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-4996 96-4996
Stainless steel bubbler, 1000ml, vertical, electropolished with fill-port, high temp valves (315°C)
96-4998 96-4998
Stainless steel bubbler, 1000ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-4998  
Stainless steel bubbler, 1000ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-5002 96-5002
Stainless steel bubbler, 1000ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-5002  
Stainless steel bubbler, 1200ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-5003 96-5003
Stainless steel bubbler, 1400ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-5003  
Stainless steel bubbler, 1500ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-5001 96-5001
Stainless steel bubbler, 1800ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-5001 95-5001
Stainless steel bubbler, 2000ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
96-5011 96-5011
Stainless steel bubbler, 2750ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-5011 95-5011
Stainless steel bubbler, 3000ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B, UN stamped
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Close Section Erbium › Compounds
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Catalog Number   Description CAS Number
26-3915 26-3915
Tris(2,6-dimethyl-3,5-heptanedionato)iron(III), 98% Fe(dibm)3 24444-72-2
26-1699 26-1699
Bis(cyclopentadienyl)iron, 98% (Ferrocene) 102-54-5
26-1700 26-1700
Bis(cyclopentadienyl)iron, 99% (Ferrocene) 102-54-5
26-0145 26-0145
Bis(N,N'-di-t-butylacetamidinato)iron (II), min. 98% 635680-56-7
26-0310  
Bis(ethylcyclopentadienyl)iron, min. 98% 1273-97-8
26-1640 26-1640
Bis(1,​1,​1,​5,​5,​5-
hexafluoroacetylacetonato)(N,N,N',N'-tetramethylethylenediamine)iron(II), min. 98%
73450-43-8
26-0400 26-0400
Bis(pentamethylcyclopentadienyl)iron, 99% 12126-50-0
26-0450 26-0450
Bis(i-propylcyclopentadienyl)iron, min. 98% 12126-34-0
93-2602  
n-Butylferrocene, 99% 31904-29-7
26-0700 26-0700
t-Butylferrocene, min. 98% 1316-98-9
26-0850  
Cyclohexadiene iron tricarbonyl, 98% 12152-72-6
26-0875 26-0875
Cyclooctatetraene iron tricarbonyl, 98% 12093-05-9
26-1600 26-1600
Ethylferrocene, 98% 1273-89-8
26-2800 26-2800
Iron pentacarbonyl, 99.5% (99.9+%-Fe) 13463-40-6
26-2801 26-2801
Iron pentacarbonyl, 99.5% (99.9+%-Fe) (Sure/Seal™ bottle) 13463-40-6
93-2644  
Iron(III) trifluoroacetylacetonate, 99% (99.9%-Fe) 14526-22-8
26-3910 26-3910
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)iron(III), 99% (99.9%-Fe) [Fe(TMHD)3] 14876-47-2
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Catalog Number   Description CAS Number
12-0845 12-0845
Bis(N,N'-di-sec-butylacetamidinato)magnesium, 99%
12-0865 12-0865
All New
Bis(N-t-butyl-N'-ethylpropanimidamidato)magnesium, min. 98% (99.99+%-Li) PURATREM
12-0500 12-0500
Bis(cyclopentadienyl)magnesium (99.9+%-Mg) 1284-72-6
97-1040 97-1040
Bis(cyclopentadienyl)magnesium (99.99+%-Mg) PURATREM 1284-72-6
12-0510 12-0510
Bis(ethylcyclopentadienyl)magnesium, min. 98% 114460-02-5
98-4006 98-4006
Bis(ethylcyclopentadienyl)magnesium, min. 98%, 12-0510, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 114460-02-5
98-4010 98-4010
Bis(ethylcyclopentadienyl)magnesium, min. 98%, 12-0510, contained in high-temp 50 ml Swagelok® cylinder (96-1071) for CVD/ALD 114460-02-5
97-1045  
Bis(pentamethylcyclopentadienyl)magnesium, elec. gr. (99.999%-Mg) PURATREM 74507-64-5
12-0550 12-0550
Bis(n-propylcyclopentadienyl)magnesium, min. 98% 114504-74-4
12-0900 12-0900
Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)magnesium, anhydrous, min. 98% [Mg(TMHD)2] 21361-35-3
98-4069 98-4069
Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)magnesium, anhydrous, min. 98% [Mg(TMHD)2] , 12-0900, contained in high-temp 50 ml Swagelok® cylinder (96-1071) for CVD/ALD 21361-35-3
12-1000 12-1000
Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)magnesium dihydrate, min. 98% [Mg(TMHD)2] 625832-70-4
12-1212  
Magnesium (N,N,N',N'-tetramethylethylenediamine)bis[BREW] (99.99+%-Mg) PURATREM
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Catalog Number   Description CAS Number
07-0385 07-0385
N,N'-Di-t-butyl-2,3-diaminobutane, 98% 1167987-07-6
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Catalog Number   Description CAS Number
14-1530 14-1530
All New
Bis(dimethylamino)dimethylsilane, 99+% BDMADMS 3768-58-9
93-1402 93-1402
3-Aminopropyltriethoxysilane, 98% APTES 919-30-2
98-4036 98-4036
3-Aminopropyltriethoxysilane, 98%, 93-1402, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 919-30-2
98-4037 98-4037
3-Aminopropyltriethoxysilane, 98%, 93-1402, contained in high-temp 50 ml Swagelok® cylinder (96-1071) for CVD/ALD 919-30-2
14-1060 14-1060
Bis(t-butylamino)silane, 97+% BTBAS 186598-40-3
14-1072 14-1072
Bis(t-butylamino)silane, BTBAS (99.999%-Si) PURATREM 186598-40-3
14-7030 14-7030
Bis(diethylamino)silane, 97% BDEAS 27804-64-4
98-8810 98-8810
Bis(diethylamino)silane, 99% (99.999%-Si) BDEAS PURATREM 27804-64-4
14-1955 14-1955
Hexakis(ethylamino)disilane (99.995%-Si) PURATREM 532980-53-3
14-1510 14-1510
2,2,4,4,6,6-Hexamethylcyclotrisilazane, 97% 1009-93-4
14-1445 14-1445
Silicon(IV) bromide, (99.99% Si) PURATREM 7789-66-4
98-4027 98-4027
Silicon(IV) chloride, fiber optic grade (99.9999%-Si, 50ppm-Fe) PURATREM, 98-0147, contained in a 50 ml electropolished Swagelok® cylinder (96-1077) for CVD/ALD 10026-04-7
93-1451  
Tetrabutoxysilane, min. 97% 4766-57-8
93-1454  
Tetraethoxysilane, min. 98% TEOS 78-10-4
14-6990 14-6990
Tetrakis(ethylmethylamino)silane, 98%, TEMAS 477284-75-6
93-1459  
Tetramethoxysilane, 98% 681-84-5
14-7025 14-7025
1,1,3,3-Tetramethyldisiloxane, 99+% TMDSO (99.9999%-Si) PURATREM 3277-26-7
93-1458  
Tetramethylsilane, 99.9+% (NMR grade) 75-76-3
14-7015 14-7015
Tri-t-butoxysilanol (99.999%-Si) PURATREM 18166-43-3
98-6025 98-6025
Tri-t-butoxysilanol (99.999%-Si) PURATREM 14-7015 contained in 50 ml Swagelok® cylinder (96-1077) for CVD/ALD 18166-43-3
14-7925  
Trimethylsilane, 97% 993-07-7
14-7020 14-7020
Tri-t-pentoxysilanol (99.999%-Si) PURATREM 17906-35-3
14-8750 14-8750
Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM 15112-89-7
98-4035 98-4035
Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 15112-89-7
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Catalog Number   Description CAS Number
22-2240 22-2240
Tetrakis(dimethylamino)titanium(IV), 99% TDMAT (99.99%-Ti) PURATREM 3275-24-9
22-1060 22-1060
Tetrakis(ethylmethylamino)titanium, 99% (99.99%-Ti) PURATREM 308103-54-0
22-0450 22-0450
Cyclopentadienyl(cycloheptatrienyl)titanium(II), 99% 51203-49-7
22-6015 22-6015
Pentamethylcyclopentadienyltris(dimethylamino)titanium(IV), 99% 154940-96-2
22-1050 22-1050
Tetrakis(diethylamino)titanium(IV), 99% 4419-47-0
98-4043 98-4043
Tetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 4419-47-0
93-2240 93-2240
Tetrakis(dimethylamino)titanium(IV), 99% TDMAT 3275-24-9
98-4015 98-4015
Tetrakis(dimethylamino)titanium(IV), 99% TDMAT, 93-2240, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 3275-24-9
98-4016 98-4016
Tetrakis(dimethylamino)titanium(IV), 99% TDMAT, 93-2240, contained in high-temp 50 ml Swagelok® cylinder (96-1071) for CVD/ALD 3275-24-9
93-2204 93-2204
Titanium(IV) n-butoxide, 98+% 5593-70-4
22-1170 22-1170
Titanium(IV) t-butoxide (99.95%-Ti) 3087-39-6
22-1150 22-1150
Titanium(IV) chloride, 99% 7550-45-0
98-4033 98-4033
Titanium(IV) chloride, 99%, 22-1150, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 7550-45-0
22-1155 22-1155
All New
Titanium(IV) chloride, (99.99+%-Ti) PURATREM 7550-45-0
22-2222  
Titanium(IV) (di-i-propoxide)bis[BREW] (99.99+%-Ti) PURATREM
22-2209 22-2209
Titanium(IV) ethoxide (99.99%-Ti) PURATREM 3087-36-3
93-2216 93-2216
Titanium(IV) i-propoxide, min. 98% 546-68-9
98-4030 98-4030
Titanium(IV) i-propoxide, min. 98%, 93-2216, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 546-68-9
22-5500 22-5500
(Trimethyl)pentamethylcyclopentadienyltitanium(IV), min. 97% 107333-47-1
22-6000 22-6000
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)titanium(III), min. 97% [Ti(TMHD)3] 181418-64-4
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