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CVD & ALD Precursors

Close Section Aluminum › Compounds
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Catalog Number   Description CAS Number
13-4500 13-4500
Hexakis(dimethylamino)dialuminum 98% (99.9%-Al) TDMAA 32093-39-3
93-1302 93-1302
Aluminum acetylacetonate, 98% 13963-57-0
93-1385 93-1385
Aluminum bromide, 99% 7727-15-3
93-1308 93-1308
Aluminum s-butoxide, 98% 2269-22-9
93-1387 93-1387
Aluminum chloride, anhydrous, reagent, 99% 7446-70-0
13-0050 13-0050
Aluminum chloride, anhydrous (99.99+%-Al) PURATREM 7446-70-0
93-1370 93-1370
Aluminum ethoxide, 99% 555-75-9
13-0200 13-0200
Aluminum hexafluoroacetylacetonate, min. 98% 15306-18-0
93-1389 93-1389
Aluminum iodide, 95% 7784-23-8
93-1345 93-1345
Aluminum i-propoxide, 98+% 555-31-7
97-0139 97-0139
Aluminum i-propoxide (99.99+%-Al) PURATREM 555-31-7
13-1600 13-1600
Dimethylaluminum i-propoxide, 98% (99.99+%-Al) PURATREM 6063-89-4
93-1358 93-1358
Tri-i-butylaluminum, min. 95% 100-99-2
13-1850 13-1850
Triethylaluminum, min. 93% 97-93-8
98-1855 98-1855
Triethylaluminum, elec. gr. (99.999+%-Al) PURATREM 97-93-8
13-1900  
Triethyl(tri-sec-butoxy)dialuminum (contains diethyl(tetra-sec-butoxy)dialuminum and tetraethyl(di-sec-butoxy)dialuminum)
93-1360 93-1360
Trimethylaluminum, min. 98% 75-24-1
98-4003 98-4003
Trimethylaluminum, min. 98%, 93-1360, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 75-24-1
98-4004 98-4004
Trimethylaluminum, min. 98%, 93-1360, contained in high-temp 50 ml Swagelok® cylinder (96-1071) for CVD/ALD 75-24-1
98-1955 98-1955
Trimethylaluminum, elec. gr. (99.999+%-Al) PURATREM 75-24-1
98-4008 98-4008
Trimethylaluminum, elec. gr. (99.999+%-Al) PURATREM, 98-1955, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 75-24-1
98-4007 98-4007
Trimethylaluminum, elec. gr. (99.999+%-Al) PURATREM, 98-1955, contained in 50 ml electropolished Swagelok® cylinder (96-1077) for CVD/ALD 75-24-1
13-5000 13-5000
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)aluminum, 99% (99.9%-Al) [Al(TMHD)3] 14319-08-5
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Close Section Antimony › Compounds
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Close Section Beryllium › Compounds
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Catalog Number   Description CAS Number
04-4000 04-4000
All New
Beryllium(II) acetylacetonate min. 97% 10210-64-7
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Close Section Boron › Compounds
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Close Section Carbon › Compounds
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Catalog Number   Description CAS Number
06-3545 06-3545
Carbon tetrachloride (99.999%-C) PURATREM 56-23-5
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Close Section Cerium › Compounds
Close Section Chromium › Compounds
Close Section Cobalt › Compounds
Close Section Copper › Compounds
Close Section Copper › Elemental forms
Catalog Number   Description Color & Form CAS Number
93-2998 93-2998
Copper shot (99.999%) 2-8 mm 7440-50-8
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Catalog Number   Description CAS Number
98-0272 98-0272
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, high temp valves (315°C)
95-0272  
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, high temp valves (315°C), DOT 4B
96-5151 96-5151
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip
95-5151  
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip, DOT 4B
98-0273 98-0273
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip with reversed handles
95-0273  
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip with reversed handles, DOT 4B
98-0275 98-0275
Stainless steel bubbler, 150ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip with rotated handles
96-5006 96-5006
Stainless steel bubbler, 300ml, horizontal in line, electropolished with fill-port, high temp valves (315°C)
95-5006  
Stainless steel bubbler, 300ml, horizontal in line, electropolished with fill-port, high temp valves (315°C), DOT 4B
96-5298 96-5298
Stainless steel bubbler, 300ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip
95-5298  
Stainless steel bubbler, 300ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip, DOT 4B
96-5007 96-5007
Stainless steel bubbler, 600ml, horizontal in line, electropolished with fill-port, high temp valves (315°C)
95-5007  
Stainless steel bubbler, 600ml, horizontal in line, electropolished with fill-port, high temp valves (315°C), DOT 4B
96-5599 96-5599
Stainless steel bubbler, 600ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip
95-5599 95-5599
Stainless steel bubbler, 600ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip, DOT 4B
96-5008 96-5008
Stainless steel bubbler, 1000ml, horizontal in line, electropolished with fill-port, high temp valves (315°C)
95-5008  
Stainless steel bubbler, 1000ml, horizontal in line, electropolished with fill-port, high temp valves (315°C), DOT 4B
96-5998 96-5998
Stainless steel bubbler, 1000ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip
95-5998  
Stainless steel bubbler, 1000ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip, DOT 4B
96-5004 96-5004
Stainless steel bubbler, 1800ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip
95-5004  
Stainless steel bubbler, 2000ml, horizontal in line, electropolished with fill-port, PCTFE valve stem tip, DOT 4B
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Catalog Number   Description CAS Number
98-0271 98-0271
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, high temp valves (315°C)
97-7000 97-7000
All New
Stainless steel low volume bubbler, 7ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-4158  
All New
Stainless steel bubbler, 200ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, no dip tube, DOT 4B
95-1050 95-1050
All New
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, pneumatic actuator valves, DOT 4B
95-0271 95-0271
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, high temp valves (315°C), DOT 4B
95-4155 95-4155
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, DOT 4B
98-0276 98-0276
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, high temp valves (315°C), with short dip tube, cut to 1 inch from top of bubbler
95-0276 95-0276
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, high temp valves (315°C), with short dip tube, cut to 1 inch from top of bubbler, DOT 4B
96-4151 96-4151
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-4151 95-4151
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B
96-4153  
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, PCTFE valve stem tip with rotated handles
95-4153  
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, PCTFE valve stem tip with rotated handles, DOT 4B
96-4149 96-4149
Stainless steel bubbler, 150ml, vertical, electropolished with fill-port, PCTFE valve stem tip, with short dip tube, cut to 5cm from top of bubbler
95-4157 95-4157
Stainless steel bubbler, 200ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, DOT 4B
98-0270 98-0270
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C)
95-0270 95-0270
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C), DOT 4B
98-0280 98-0280
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles
95-0280  
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, DOT 4B
96-4295 96-4295
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, no dip tube
95-4295  
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, no dip tube, DOT 4B
96-4290 96-4290
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-4290  
Stainless steel bubbler, 300ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B
96-4599 96-4599
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, high temp valves (315°C)
95-4599  
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, high temp valves (315°C), DOT 4B
96-4610 96-4610
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, no dip tube, stems same height
95-4610 95-4610
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, high temp valves (315°C) with rotated handles, no dip tube, stems same height, DOT 4B
96-4598 96-4598
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-4598 95-4598
Stainless steel bubbler, 600ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B
96-4996 96-4996
Stainless steel bubbler, 1000ml, vertical, electropolished with fill-port, high temp valves (315°C)
96-4998 96-4998
Stainless steel bubbler, 1000ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-4998  
Stainless steel bubbler, 1000ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B
96-5002 96-5002
Stainless steel bubbler, 1000ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-5002  
Stainless steel bubbler, 1200ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B
96-5003 96-5003
Stainless steel bubbler, 1400ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-5003  
Stainless steel bubbler, 1500ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B
96-5001 96-5001
Stainless steel bubbler, 1800ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-5001 95-5001
Stainless steel bubbler, 2000ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B
96-5011 96-5011
Stainless steel bubbler, 2750ml, vertical, electropolished with fill-port, PCTFE valve stem tip
95-5011 95-5011
Stainless steel bubbler, 3000ml, vertical, electropolished with fill-port, PCTFE valve stem tip, DOT 4B
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Close Section Erbium › Compounds
Close Section Europium › Compounds
Close Section Gadolinium › Compounds
Close Section Gallium › Compounds
Close Section Germanium › Compounds
Close Section Gold › Compounds
Close Section Hafnium › Compounds
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Catalog Number   Description CAS Number
72-0700 72-0700
Bis(cyclopentadienyl)dimethylhafnium, min. 97% 37260-88-1
72-1000 72-1000
Bis(cyclopentadienyl)hafnium dichloride, min. 98% (Hafnocene dichloride) 12116-66-4
72-1250 72-1250
Bis(ethylcyclopentadienyl)hafnium dichloride, min. 98% 78205-93-3
72-1500 72-1500
Bis(pentamethylcyclopentadienyl)hafnium dichloride, min. 98% 85959-83-7
72-2000 72-2000
Bis(i-propylcyclopentadienyl)hafnium dichloride, min. 98% 66349-80-2
72-1900 72-1900
Dimethylbis(t-butylcyclopentadienyl)hafnium(IV), min. 98% 68193-45-3
72-2002 72-2002
Hafnium(IV) acetylacetonate, min. 96% 17475-67-1
72-5800 72-5800
Hafnium(IV) t-butoxide (99.9%-Hf, <1.5%-Zr) 2172-02-3
72-0751 72-0751
Hafnium(IV) chloride, sublimed grade (99.9+%-Hf, <1.0% Zr) 13499-05-3
72-5900 72-5900
Hafnium(IV) ethoxide, 99% 13428-80-3
72-6000 72-6000
Pentamethylcyclopentadienylhafnium trichloride, min. 98% 75181-08-7
72-7000 72-7000
i-Propylcyclopentadienylhafnium trichloride, min. 98% 329736-06-3
72-7750 72-7750
Tetrakis(diethylamino)hafnium, 99% (99.99+%-Hf, <0.2% Zr) PURATREM 19824-55-6
72-8000 72-8000
Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2% Zr) TDMAH, PURATREM 19782-68-4
98-4021 98-4021
Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2%-Zr) TDMAH, PURATREM, 72-8000, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 19782-68-4
98-4022 98-4022
Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2%-Zr) TDMAH, PURATREM, 72-8000, contained in 50ml Swagelok® cylinder (96-1071) for CVD/ALD 19782-68-4
72-7720 72-7720
Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH PURATREM 352535-01-4
98-4048 98-4048
Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH, PURATREM, 72-7720, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 352535-01-4
72-7580 72-7580
Tetrakis(2,2,6,6-tetramethyl-3,5-heptanedionato)hafnium(IV), 99% 63370-90-1
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Close Section Indium › Compounds
Close Section Iridium › Compounds
Close Section Iron › Compounds
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Catalog Number   Description CAS Number
26-3915 26-3915
Tris(2,6-dimethyl-3,5-heptanedionato)iron(III), 98% Fe(dibm)3 24444-72-2
26-1699 26-1699
Bis(cyclopentadienyl)iron, 98% (Ferrocene) 102-54-5
26-1700 26-1700
Bis(cyclopentadienyl)iron, 99% (Ferrocene) 102-54-5
26-0145 26-0145
Bis(N,N'-di-t-butylacetamidinato)iron (II), min. 98% 635680-56-7
26-0310 26-0310
Bis(ethylcyclopentadienyl)iron, min. 98% 1273-97-8
26-1640 26-1640
Bis(1,​1,​1,​5,​5,​5-
hexafluoroacetylacetonato)(N,N,N',N'-tetramethylethylenediamine)iron(II), min. 98%
73450-43-8
26-0400 26-0400
Bis(pentamethylcyclopentadienyl)iron, 99% 12126-50-0
26-0450 26-0450
Bis(i-propylcyclopentadienyl)iron, min. 98% 12126-34-0
26-0700 26-0700
t-Butylferrocene, min. 98% 1316-98-9
26-0850  
Cyclohexadiene iron tricarbonyl, 98% 12152-72-6
26-0875 26-0875
Cyclooctatetraene iron tricarbonyl, 98% 12093-05-9
26-0900 26-0900
Cyclopentadienyliron dicarbonyl dimer, 99% 12154-95-9
26-1500 26-1500
1,1'-Dimethylferrocene, min. 98% 1291-47-0
26-1600 26-1600
Ethylferrocene, 98% 1273-89-8
26-2300 26-2300
Iron(III) acetylacetonate, 99% 14024-18-1
26-2800 26-2800
Iron pentacarbonyl, 99.5% (99.9+%-Fe) 13463-40-6
26-2801 26-2801
Iron pentacarbonyl, 99.5% (99.9+%-Fe) (Sure/Seal™ bottle) 13463-40-6
93-2644 93-2644
Iron(III) trifluoroacetylacetonate, 99% (99.9%-Fe) 14526-22-8
26-3910 26-3910
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)iron(III), 99% (99.9%-Fe) [Fe(TMHD)3] 14876-47-2
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Close Section Lanthanum › Compounds
Close Section Lead › Compounds
Close Section Lithium › Compounds
Close Section Lutetium › Compounds
Close Section Magnesium › Compounds
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Catalog Number   Description CAS Number
12-0845 12-0845
Bis(N,N'-di-sec-butylacetamidinato)magnesium, 99% 2080369-35-1
12-0865 12-0865
All New
Bis(N-t-butyl-N'-ethylpropanimidamidato)magnesium, min. 98% (99.99+%-Li) PURATREM
12-0500 12-0500
Bis(cyclopentadienyl)magnesium (99.9+%-Mg) 1284-72-6
97-1040 97-1040
Bis(cyclopentadienyl)magnesium (99.99+%-Mg) PURATREM 1284-72-6
12-0510 12-0510
Bis(ethylcyclopentadienyl)magnesium, min. 98% 114460-02-5
98-4006 98-4006
Bis(ethylcyclopentadienyl)magnesium, min. 98%, 12-0510, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 114460-02-5
98-4010 98-4010
Bis(ethylcyclopentadienyl)magnesium, min. 98%, 12-0510, contained in high-temp 50 ml Swagelok® cylinder (96-1071) for CVD/ALD 114460-02-5
97-1045 97-1045
Bis(pentamethylcyclopentadienyl)magnesium, elec. gr. (99.999%-Mg) PURATREM 74507-64-5
12-0550 12-0550
Bis(n-propylcyclopentadienyl)magnesium, min. 98% 114504-74-4
12-0900 12-0900
Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)magnesium, anhydrous, min. 98% [Mg(TMHD)2] 21361-35-3
98-4069 98-4069
Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)magnesium, anhydrous, min. 98% [Mg(TMHD)2] , 12-0900, contained in high-temp 50 ml Swagelok® cylinder (96-1071) for CVD/ALD 21361-35-3
12-1000 12-1000
Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)magnesium dihydrate, min. 98% [Mg(TMHD)2] 625832-70-4
93-1280 93-1280
Magnesium acetylacetonate, anhydrous, 98% 14024-56-7
93-1227 93-1227
Magnesium hexafluoroacetylacetonate dihydrate, min. 97% 120156-45-8
12-1212  
Magnesium (N,N,N',N'-tetramethylethylenediamine)bis[BREW] (99.99+%-Mg) PURATREM
93-1259 93-1259
Magnesium trifluoroacetylacetonate dihydrate, min. 98% 53633-79-7
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Close Section Manganese › Compounds
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Close Section Neodymium › Compounds
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Catalog Number   Description CAS Number
28-0025 28-0025
Bis[1-(N,N-dimethylamino)-2-propanolato]nickel(II), 99% NiDMAP 200284-92-0
28-1210 28-1210
All New
(Acetonitrile)dichloronickel(II), 99% 18897-44-4
28-0225 28-0225
All New
Bis(1,4-di-t-butyl-1,3-diazabutadienyl)nickel(II) Ni(DAD)2, min. 98% (99.999%-Ni) PURATREM 63576-87-4
28-1301 28-1301
Bis(cyclopentadienyl)nickel, 99% (Nickelocene) 1271-28-9
28-0045 28-0045
Bis(N,N'-di-t-butylacetamidinato)nickel(II), (99.999%-Ni) PURATREM 940895-79-4
28-0083 28-0083
Bis(ethylcyclopentadienyl)nickel, min. 98% 31886-51-8
28-0085 28-0085
Bis(pentamethylcyclopentadienyl)nickel, 98% (Decamethylnickelocene) 74507-63-4
28-0086 28-0086
Bis(i-propylcyclopentadienyl)nickel, min. 98% 57197-55-4
28-0087 28-0087
Bis(tetramethylcyclopentadienyl)nickel, min. 98% 79019-60-6
28-0088 28-0088
Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)nickel(II), min. 98% (99.9%-Ni) [Ni(TMHD)2] 14481-08-4
28-1130 28-1130
Nickel(II) acetylacetonate, anhydrous, min. 95% 3264-82-2
28-1110 28-1110
Nickel(II) acetylacetonate hydrate 120156-44-7
28-1150 28-1150
Nickel carbonyl 13463-39-3
93-2821 93-2821
Nickel(II) hexafluoroacetylacetonate hydrate, 98% 14949-69-0
28-1600 28-1600
Nickel(II) phthalocyanine, min. 94% 14055-02-8
93-2843 93-2843
Nickel(II) trifluoroacetylacetonate dihydrate, 98% 14324-83-5
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Close Section Niobium › Compounds
Close Section Nitrogen › Compounds
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Catalog Number   Description CAS Number
07-0385 07-0385
N,N'-Di-t-butyl-2,3-diaminobutane, 98% 1167987-07-6
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Close Section Osmium › Compounds
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Catalog Number   Description CAS Number
93-1910 93-1910
CALLERY™ Potassium tert-butoxide, min. 99% 865-47-4
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Close Section Praseodymium › Compounds
Close Section Rhenium › Compounds
Close Section Rhodium › Compounds
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Catalog Number   Description CAS Number
44-8165 44-8165
Bis(1,1,1-trifluoro-2,4-pentanedionato)(1,5-cyclooctadiene)ruthenium(II), 98% 38704-78-8
44-0056 44-0056
All New
Bis(N,N’-di-t-butylacetamidinato)ruthenium(II) dicarbonyl, 98% (99.99%-Ru) PURATREM 949113-49-9
44-5150 44-5150
All New
Allylruthenium(II) tricarbonyl bromide, 98% 31781-74-5
44-6200 44-6200
Bis(cyclopentadienyl)ruthenium, 99% (99.9%-Ru) (Ruthenocene) 1287-13-4
44-0040 44-0040
Bis(ethylcyclopentadienyl)ruthenium(II), 98% (99.9%-Ru) 32992-96-4
98-4009 98-4009
Bis(ethylcyclopentadienyl)ruthenium(II), 98% (99.9%-Ru), 44-0040, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 32992-96-4
98-4067 98-4067
Bis(ethylcyclopentadienyl)ruthenium(II), 98% (99.9%-Ru), 44-0040, contained in high-temp 50 ml Swagelok® cylinder (96-1071) for CVD/ALD 32992-96-4
44-0046 44-0046
Bis(2-methylallyl)(1,5-cyclooctadiene)ruthenium(II), min. 97% 12289-94-0
44-0050 44-0050
Bis(pentamethylcyclopentadienyl)ruthenium, 99% (99.9%-Ru) (Decamethylruthenocene) 84821-53-4
44-0060 44-0060
Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)(1,5-cyclooctadiene)ruthenium(
II), 99% (99.9%-Ru)
329735-79-7
44-0175 44-0175
Dicarbonylcyclopentadienylruthenium dimer, 99% 12132-87-5
44-1800 44-1800
Ruthenium(III) acetylacetonate, 99% 14284-93-6
44-1850 44-1850
Ruthenium carbonyl, 99% 15243-33-1
44-8000 44-8000
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)ruthenium(III), 99% (99.9%-Ru) [Ru(TMHD)3] 38625-54-6
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Catalog Number   Description CAS Number
14-1530 14-1530
All New
Bis(dimethylamino)dimethylsilane, 99+% BDMADMS 3768-58-9
14-7125 14-7125
All New
Hexamethyldisiloxane, 97+% HMDSO 107-46-0
14-1550 14-1550
All New
Bis(ethylmethylamino)silane, 99%, BEMAS (99.999%-Si) PURATREM 1011514-41-2
93-1402 93-1402
3-Aminopropyltriethoxysilane, 98% APTES 919-30-2
98-4036 98-4036
3-Aminopropyltriethoxysilane, 98%, 93-1402, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 919-30-2
98-4037 98-4037
3-Aminopropyltriethoxysilane, 98%, 93-1402, contained in high-temp 50 ml Swagelok® cylinder (96-1071) for CVD/ALD 919-30-2
14-1060 14-1060
Bis(t-butylamino)silane, 97+% BTBAS 186598-40-3
14-1072 14-1072
Bis(t-butylamino)silane, BTBAS (99.999%-Si) PURATREM 186598-40-3
14-7030 14-7030
Bis(diethylamino)silane, 97% BDEAS 27804-64-4
98-8810 98-8810
Bis(diethylamino)silane, 99% (99.999%-Si) BDEAS PURATREM 27804-64-4
14-1955 14-1955
Hexakis(ethylamino)disilane (99.995%-Si) PURATREM 532980-53-3
14-1510 14-1510
2,2,4,4,6,6-Hexamethylcyclotrisilazane, 97% 1009-93-4
14-1445 14-1445
Silicon(IV) bromide, (99.99% Si) PURATREM 7789-66-4
98-4027 98-4027
Silicon(IV) chloride, fiber optic grade (99.9999%-Si, 50ppm-Fe) PURATREM, 98-0147, contained in a 50 ml electropolished Swagelok® cylinder (96-1077) for CVD/ALD 10026-04-7
93-1451 93-1451
Tetrabutoxysilane, min. 97% 4766-57-8
93-1454 93-1454
Tetraethoxysilane, min. 98% TEOS 78-10-4
14-6990 14-6990
Tetrakis(ethylmethylamino)silane, 98%, TEMAS 477284-75-6
93-1459 93-1459
Tetramethoxysilane, 98% 681-84-5
14-7025 14-7025
1,1,3,3-Tetramethyldisiloxane, 99+% TMDSO 3277-26-7
93-1458 93-1458
Tetramethylsilane, 99.9+% (NMR grade) 75-76-3
14-7015 14-7015
Tri-t-butoxysilanol (99.999%-Si) PURATREM 18166-43-3
98-6025 98-6025
Tri-t-butoxysilanol (99.999%-Si) PURATREM 14-7015 contained in 50 ml Swagelok® cylinder (96-1077) for CVD/ALD 18166-43-3
14-7925 14-7925
Trimethylsilane, 97% 993-07-7
14-7020 14-7020
Tri-t-pentoxysilanol (99.999%-Si) PURATREM 17906-35-3
14-8750 14-8750
Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM 15112-89-7
98-4035 98-4035
Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 15112-89-7
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Catalog Number   Description CAS Number
93-1022 93-1022
CALLERY™ Sodium tert-butoxide, min. 98% 865-48-5
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Catalog Number   Description CAS Number
22-2240 22-2240
Tetrakis(dimethylamino)titanium(IV), 99% TDMAT (99.99%-Ti) PURATREM 3275-24-9
22-1060 22-1060
Tetrakis(ethylmethylamino)titanium, 99% (99.99%-Ti) PURATREM 175923-03-2
22-0450 22-0450
Cyclopentadienyl(cycloheptatrienyl)titanium(II), 99% 51203-49-7
22-1078 22-1078
Pentamethylcyclopentadienyltitanium trimethoxide, min. 97% 123927-75-3
22-6015 22-6015
Pentamethylcyclopentadienyltris(dimethylamino)titanium(IV), 99% 154940-96-2
22-1050 22-1050
Tetrakis(diethylamino)titanium(IV), 99% 4419-47-0
98-4043 98-4043
Tetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 4419-47-0
93-2240 93-2240
Tetrakis(dimethylamino)titanium(IV), 99% TDMAT 3275-24-9
98-4015 98-4015
Tetrakis(dimethylamino)titanium(IV), 99% TDMAT, 93-2240, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 3275-24-9
98-4016 98-4016
Tetrakis(dimethylamino)titanium(IV), 99% TDMAT, 93-2240, contained in high-temp 50 ml Swagelok® cylinder (96-1071) for CVD/ALD 3275-24-9
93-2204 93-2204
Titanium(IV) n-butoxide, 98+% 5593-70-4
22-1170 22-1170
Titanium(IV) t-butoxide (99.95%-Ti) 3087-39-6
22-1150 22-1150
Titanium(IV) chloride, 99% 7550-45-0
98-4033 98-4033
Titanium(IV) chloride, 99%, 22-1150, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 7550-45-0
22-1155 22-1155
All New
Titanium(IV) chloride, (99.99+%-Ti) PURATREM 7550-45-0
93-2203 93-2203
Titanium (di-i-propoxide)bis(acetylacetonate) (75% in isopropanol) 17927-72-9
22-2222  
Titanium(IV) (di-i-propoxide)bis[BREW] (99.99+%-Ti) PURATREM
22-2209 22-2209
Titanium(IV) ethoxide (99.99%-Ti) PURATREM 3087-36-3
93-2216 93-2216
Titanium(IV) i-propoxide, min. 98% 546-68-9
98-4030 98-4030
Titanium(IV) i-propoxide, min. 98%, 93-2216, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 546-68-9
22-5500 22-5500
(Trimethyl)pentamethylcyclopentadienyltitanium(IV), min. 97% 107333-47-1
22-6000 22-6000
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)titanium(III), min. 97% [Ti(TMHD)3] 181418-64-4
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Catalog Number   Description CAS Number
54-1500 54-1500
Xenon(II) fluoride, 99.5% 13709-36-9
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Catalog Number   Description CAS Number
98-4042 98-4042
Tetrakis(dimethylamino)zirconium(IV), 98% (99.99%-Zr) TDMAZ, 40-4115, contained in 50ml Swagelok® cylinder (96-1070) for CVD/ALD 19756-04-8
40-1028 40-1028
All New
Bis(methylcyclopentadienyl)(methyl)(methoxy)zirconium(IV), 98+% 916597-01-8
40-1000 40-1000
Bis(cyclopentadienyl)dimethylzirconium, min. 97% 12636-72-5
40-1054 40-1054
Bis(pentamethylcyclopentadienyl)dimethylzirconium(IV), 99% 67108-80-9
40-1110 40-1110
Dimethylbis(t-butylcyclopentadienyl)zirconium, min. 98% 68193-40-8
93-4040 93-4040
Tetrakis(diethylamino)zirconium, 99% 13801-49-5
40-4100 40-4100
Tetrakis(dimethylamino)zirconium(IV), 99% TDMAZ 19756-04-8
98-4012 98-4012
Tetrakis(dimethylamino)zirconium(IV), 99% TDMAZ, 40-4100, contained in 50 ml Swagelok® cylinder for (96-1070) CVD/ALD 19756-04-8
40-4115 40-4115
Tetrakis(dimethylamino)zirconium(IV), 98% (99.99%-Zr) PURATREM TDMAZ 19756-04-8
40-1710 40-1710
Tetrakis(ethylmethylamino)zirconium(IV), 99% TEMAZ 175923-04-3
98-4039 98-4039
Tetrakis(ethylmethylamino)zirconium(IV) 99% TEMAZ, 40-1710, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 175923-04-3
40-5000 40-5000
Tetrakis(2,2,6,6-tetramethyl-3,5-heptanedionato)zirconium(IV), 99% [Zr(TMHD)4] 18865-74-2
93-4003 93-4003
Zirconium(IV) n-butoxide (76-80% in n-butanol) 1071-76-7
40-1749 40-1749
Zirconium(IV) t-butoxide, 98% 2081-12-1
40-1750 40-1750
Zirconium(IV) t-butoxide (99.99%-Zr) PURATREM 2081-12-1
93-4045 93-4045
Zirconium(IV) chloride (99.5+%-Zr) 10026-11-6
40-4046 40-4046
Zirconium(IV) chloride, sublimed grade (99.95+%-Zr) 10026-11-6
93-4043 93-4043
Zirconium(IV) ethoxide, 99+% 18267-08-8
40-3000 40-3000
Zirconium(IV) hexafluoroacetylacetonate 19530-02-0
40-4016 40-4016
Zirconium(IV) i-propoxide (isopropanol adduct) (99.9%-Zr) 14717-56-7
93-4017 93-4017
Zirconium(IV) n-propoxide (23-28% free alcohol) 23519-77-9
93-4026 93-4026
Zirconium(IV) trifluoroacetylacetonate, 99% 17499-68-2
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