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CAS Number: 15112-89-7
Product Catalog

98-4035
Silicon › Tris(dimethylamino)silane, 99+%, 14-8750, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD
CAS Number: 15112-89-7
MDL Number: MFCD00048006
Molecular Formula: C6H19N3Si
Molecular Weight: 161.32
Chemical Formula: [(CH3)2N]3SiH
Color and Form: colorless to light yellow liq.
Note:  

Safety: Hazardous

Physical Characteristics: boiling point 145-148°C (4°C/16mm), flash point 77°F, density 0.84

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98-4035 Tris(dimethylamino)silane, 99+%, 14-8750, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD

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