CAS Number: 19756-04-8
Product Catalog

98-4012

Zirconium › Tetrakis(dimethylamino)zirconium(IV), 99% TDMAZ, 40-4100, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD

Stability: moisture sensitive, store cold

Safety: Hazardous

Physical Characteristics: melting point 57-60°C, boiling point 80°C/.01mm

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SECTION 1: Product Identification
Chemical Name:	Tetrakis(dimethylamino)zirconium(IV), 99% TDMAZ, 40-4100, contained in 50 ml Swagelok� cylinder for CVD/ALD
Product Number:	98-4012
CAS Registry Number:	19756-04-8
Formula:	Zr[N(CH3)2]4
EINECS Number:	none
Chemical Family:	metal amide complex
Synonym:	Zirconium-tetrakis-dimethylamide

SECTION 2: Composition and Information on Ingredients
Ingredient	CAS Number	Percent	ACGIH (TWA)	OSHA (PEL)
Title compound	19756-04-8	100	5mg/m3 (as Zr)	5mg/m3 (as Zr)

SECTION 3: Hazards Identification
Emergency Overview:	Dimethylamine hydrolysis product is extremely corrosive to tissue of the mucous membranes and upper respiratory tract, skin and eyes.
Primary Routes of Exposure:	Ingestion, inhalation of dust and vapor
Eye Contact:	Causes burns to the eyes
Skin Contact:	Causes burns to the skin.
Inhalation:	Causes caustic burns to the nose, mucous membranes and respiratory tract.
Ingestion:	Ingestion may lead to burning sensation, dizziness, abdominal cramps, vomiting, bloody diarrhea, weakness and convulsions.
Acute Health Effects:	Causes burns to skin, eyes and respiratory tract. May be harmful if swallowed or inhaled.
Chronic Health Effects:	No information on long-term chronic effects.
NTP:	No
IARC:	No
OSHA:	No

SECTION 4: First Aid Measures
Eye Exposure:	Immediately flush the eyes with copious amounts of water for at least 10-15 minutes. A victim may need assistance in keeping their eye lids open. Get immediate medical attention.
Skin Exposure:	Wash the affected area with water. Remove contaminated clothes if necessary. Seek medical assistance if irritation persists.
Inhalation:	Remove the victim to fresh air. Closely monitor the victim for signs of respiratory problems, such as difficulty in breathing, coughing, wheezing, or pain. In such cases seek immediate medical assistance.
Ingestion:	Seek medical attention immediately. Keep the victim calm. Give the victim water (only if conscious). Induce vomiting only if directed by medical personnel.

SECTION 5: Fire Fighting Measures
Flash Point:	no data
Autoignition Temperature:	no data
Explosion Limits:	no data
Extinguishing Medium:	carbon dioxide, foam or dry powder
Special Fire Fighting Procedures:	If this product is involved in a fire, fire fighters should be equipped with a NIOSH approved positive pressure self-contained breathing apparatus and full protective clothing.
Hazardous Combustion and Decomposion Products:	If involved in a fire, this material may emit irritating organic fumes.
Unusual Fire or Explosion Hazards:	Flammable solid. Emit toxic fumes under fire conditions

SECTION 6: Accidental Release Measures
Spill and Leak Procedures:	Flush with water. Sweep up the solids and dispose of properly.

SECTION 7: Handling and Storage
Handling and Storage:	Store cold, in freezer, in a tightly sealed container. Keep away from heat and direct sunlight. Handle and store under an inert atmosphere of nitrogen or argon.

SECTION 8: Exposure Controls and Personal Protection
Eye Protection:	Always wear approved safety glasses when handling a chemical substance in the laboratory.
Skin Protection:	Wear protective clothing and gloves.
Ventilation:	Handle the material in an efficient fume hood.
Respirator:	If ventilation is not available a respirator should be worn. The use of respirators requires a Respirator Protection Program to be in compliance with 29 CFR 1910.134.
Additional Protection:	No additional protection required.

SECTION 9: Physical and Chemical Properties
Color and Form:	light yellow xtl.
Molecular Weight:	267.53
Melting Point:	no data
Boiling Point:	80?/0.1mm
Vapor Pressure:	no data
Specific Gravity:	no data
Odor:	slight amine odor
Solubility in Water:	reacts with water

SECTION 10: Stability and Reactivity
Stability:	moisture sensitive
Hazardous Polymerization:	no hazardous polymerization
Conditions to Avoid:	contact with water
Incompatibility:	Water, mineral acids, halogens and oxidizing agents
Decomposition Products:	Carbon dioxide, carbon monoxide, organic fumes and zirconium oxide.

SECTION 11: Toxicological Information
RTECS Data:	No information available from the RTECS files.
Carcinogenic Effects:	no data
Mutagenic Effects:	no data
Tetratogenic Effects:	no data

SECTION 12: Ecological Information
Ecological Information:	No information available.

SECTION 13: Disposal Considerations
Disposal:	Dispose of this material according to local, state and federal regulations.

SECTION 14: Transportation
Shipping Name (CFR):	Water-reactive solid, Corrosive, N.O.S.
Hazard Class (CFR):	4.3
Additional Hazard Class (CFR):	NA
Packaging Group (CFR):	II
UN ID Number (CFR):	UN# 3131
Shipping Name (IATA):	Water-reactive solid, Corrosive, N.O.S.
Hazard Class (IATA):	4.3
Additional Hazard Class (IATA):	NA
Packaging Group (IATA):	II
UN ID Number (IATA):	UN# 3131

SECTION 15: Regulatory Information
TSCA:	Not listed in the TSCA inventory
SARA (Title 313):	Title compound not listed
Second Ingredient:	none
Third Ingredient:	none

SECTION 16: Other Information
Disclaimer:	The information herein is believed to be accurate and reliable as of the date compiled. However, Strem Chemicals, Inc. makes no representation, warranty, or guarantee of any kind with respect to the information contained in this document or any use of the product based on this information.
Preparation Date:	4/21/2011
Revision Date:	4/06/2012